model:PT-T1200
LCD Touch Screen 3 Zones Tube Furnace
Application: A gas mixing tank is installed on the bottom shell, and 3 stainless steel needle valves are installed on the left side of the bottom shell to manually control the mixing of 3 kinds of gases.
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Detailed Parameters Of The Product
Product Description: PT-T1200 CVD is a tube furnace with 80mm diameter alumina tube vacuum pump and three channels Mass Flow Meters gas flowing system. It can mix 1-3 types of gases for CVD or diffusion.
Technical Parameter:
Model |
PT-T1200 CVD with 3 MFC Gas channels |
|
Display |
LED |
Max. Temperature |
1200℃ for short time |
Continuous Working Temp. |
≤1100℃ |
Heating Rate |
Suggestion: 0~10℃/min |
Temperature Zone |
220mm+220mm+220mm |
Heating Element |
Resistance Wire With Mo |
Thermocouple |
K Type |
Temperature Control Accuracy |
±1℃ |
Tube Size |
80x1200mm (OD x L) |
Tube Block |
Two fibrous ceramic blocks are included for blocking heat radiation from inside tube (Ceramic blocks must be fully inserted into the furnace chamber before heating). |
Temperature Control |
PID automatic control via SCR power control |
Program and Ramps |
30 steps programmable |
Vacuum Flange |
Stainless Steel vacuum flange with valves
|
Power |
220V, 50 Hz, single phase at max.6KW |
Mass Flow Meters |
Three precision mass flow meters :
MFC 1: Gas flow range from 0~100 sccm
MFC 2: Gas flow range from 0~200 sccm
MFC 3: Gas flow range from 0~200 sccm
(Gas flow range can be according to your requirement)
One gas mixing tank is installed on bottom case with 3 stainless steel needle valves is installed on left side of bottom case to control 3 type gases mixing manually
Below photo is 4 MFC for reference. 3 MFC will be with 3 displays
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